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[资料] Materials Science in Microelectronics II, Second Edition: The effects of stru...

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发表于 2016-8-16 17:23:17 | 显示全部楼层 |阅读模式

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Materials Science in Microelectronics II, Second Edition: The effects of structure on properties in thin films --- 微电子中的材料科学II(第二版):结构对薄膜性能的影响



The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship.

Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following:
• Electrical properties• Magnetic properties• Optical properties• Mechanical properties• Mass transport properties• Interface and junction properties• Defects and properties
* Captures the importance of thin films to microelectronic development* Examines the cause / effect relationship of structure on thin film properties

Materials Science in Microelectronics II.pdf

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