小英说半导体 发表于 2024-4-9 11:16:21

蚀刻过程中的蚀刻引起的物理损伤和污染

引言高选择性氧化物蚀刻是成功制造下一代半导体器件的重要过程。为了实现这一目标,高密度等离子体源通常使用高C/F比值气体和含氢气体的组合进行研究。使用高C/F比气体和含氢气体产生更高的C/F比等离子体,并在螺旋波等离子体和电感耦合等离子体等高离子等离子轰击下产生高选择性的氧化物蚀刻。英思特研究了C4F8/ H2螺旋波等离子体对氧化物过拉伸后蚀刻硅表面的损伤和污染,以及清洗和退火去除损伤和污染的方法。在蚀刻和腐蚀后处理的硅表面形成了Co硅化物,并研究了剩余损伤和残留物对稳定Co硅化物形成的影响。实验与讨论本研究采用螺旋波等离子体蚀刻器进行高选择性接触氧化物蚀刻。用70%的C4F8/30%的h2气体蚀刻n型硅片上的1 mm厚的硅酸盐玻璃(PSG)。氧化物蚀刻时间是通过实现1 mm厚的PSG的50%的过刻周期来设定的,从而导致暴露的硅表面。用食人鱼清洗溶液(H2SO4:H2O2 5 4:1,908 C)清洗过度干燥的硅晶片10 min。此外,为了研究残留物组分在硅中的植入和扩散程度,我们使用了二次离子质谱(SIMS)估计电损伤剩余的蚀刻和退火硅表面,载流子寿命和扩散长度测量使用SPV技术,和高分辨率透射电子显微镜被用来观察剩余的物理缺陷热退火前后。data:image/png;base64,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
图1:等离子体处理蚀刻的扫描数据英思特研究了蚀刻后残留物的碳1s键态,如图3所示,氧等离子体清洗通常减少了大部分C-Fx(x5 1、2、3)键和许多C-CFx键,然而,其他键,如C-C/H、C-O和C-Si,在两种气体条件下保持相似。因此,经过氧等离子体清洗后,残渣变为富碳物质。两种气体条件下的氧等离子体清洗后的退火去除了富碳残留物,以及通过将退火温度提高到6008 C来去除更多的残留物。结论英思特研究了C4F8和C4F8/H2螺旋波等离子体以及各种清洗和退火处理的硅片上的损伤和残留。用食人鱼清洗、氧等离子体清洗和氧等离子体清洗后的退火来去除残留物和/或损伤。C4F8残留物由碳、氟、氧组成,在C4F8等离子体中加入30% H2,增加了C/F比和残留物的厚度,改变了蚀刻硅表面残留物的碳键状态。此外,残留物中还包含了氢气。残留物中的氟成分很容易通过o2-等离子体清除去除,而碳成分仍然保留,无论气体化学成分如何,残留的70% C4F8/30% H2螺旋波等离子体处理比残留由C4F8,和最干净的表面接近控制表面可以获得硅过度与70%60088/30%H2退火后氧等离子体清洗。
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查看完整版本: 蚀刻过程中的蚀刻引起的物理损伤和污染