EDA1024论坛 › Wafer Processings 【晶圆制造】 › 利用氨等离子体预处理进行无缝间隙fll工艺的生长抑制

小英说半导体 发表于 2024-3-29 16:54:51

利用氨等离子体预处理进行无缝间隙fll工艺的生长抑制

本帖最后由 小英说半导体 于 2024-3-29 16:58 编辑

引言半导体器件的设计规则收缩是集成过程中每一步的一个挑战。在隔离的间隙-fll过程中，使用沉积工艺不能抑制接缝和空隙的形成，甚至具有良好的台阶覆盖。为了在高纵横比结构中实现无缝间隙fll，其具有非理想的负斜率，沉积过程应能够实现“自下而上的生长”行为。在本研究中，利用等离子体处理的生长抑制过程，研究了二氧化硅等离子体增强原子层沉积（PE-ALD）过程在沟槽结构中自下而上的生长。采用n2和氨等离子体预处理抑制二氧化硅PE-ALD过程的生长，并采用x射线光电子能谱进行表面化学分析，研究其抑制机理。实验设计规则收缩是提高半导体积分密度的关键要求。为了实现一个简化设计规则的设备，不仅图案化过程，如光刻和蚀刻，而且在通道所在的活动物之间的隔离，对于确保设备的稳健操作很重要。在这方面，隔离过程，如浅沟槽隔离、接触孔、通道空孔氧化物和金属间介质，已经成为获得尖端半导体器件的重要手段。然而，隔离过程的多样性随着结构纵横比的增加和具有移动深度（~1 μm）的活性物质之间空间的减少而增加。因此，应开发一种具有良好步长覆盖能力的沉积过程，可以覆盖不形成接缝或孔隙的活动物之间的空间：这是沉积过程的特性之一，称为“间隙-fll特性”。在这方面，原子层沉积（ALD）已被使用作为一个间隙-fll过程，使用二氧化硅较薄的flms。Te ALD过程表现出由前驱体在底物表面的化学吸附引起的自限性生长行为，导致步长覆盖率超过95%。然而，ALD过程的良好的台阶覆盖导致了接缝或空洞的形成。
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查看完整版本: 利用氨等离子体预处理进行无缝间隙fll工艺的生长抑制